8/18/2012	8:11:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/18/2012	8:11:45 AM	Recipe started at 8:11 AM
8/18/2012	8:11:45 AM	Helium valve closed
8/18/2012	8:11:45 AM	H2 valve closed
8/18/2012	8:11:45 AM	BCl3 valve closed
8/18/2012	8:11:45 AM	PH3 valve closed
8/18/2012	8:11:45 AM	SiCl4 pre valve closed
8/18/2012	8:11:45 AM	SiCl4 post valve closed
8/18/2012	8:11:45 AM	Main Vac valve closed
8/18/2012	8:11:45 AM	Bypass valve closed
8/18/2012	8:11:45 AM	Bubbler valve closed
8/18/2012	8:11:45 AM	Helium MFC set to  0.000000
8/18/2012	8:11:45 AM	H2 MFC set to  0.000000
8/18/2012	8:11:45 AM	BCl3 MFC set to  0.000000
8/18/2012	8:11:45 AM	PH3 MFC set to  0.000000
8/18/2012	8:11:45 AM	SiCl4 MFC set to  0.000000
8/18/2012	8:11:45 AM	Bypass solenoid MFC set to  0.000000
8/18/2012	8:11:46 AM	Tube furnace set to 0
8/18/2012	8:11:49 AM	H2 valve closed
8/18/2012	8:11:49 AM	BCl3 valve closed
8/18/2012	8:11:49 AM	PH3 valve closed
8/18/2012	8:11:49 AM	SiCl4 pre valve closed
8/18/2012	8:11:49 AM	SiCl4 post valve closed
8/18/2012	8:11:49 AM	Main Vac valve closed
8/18/2012	8:11:49 AM	Bypass valve closed
8/18/2012	8:11:49 AM	Bubbler valve closed
8/18/2012	8:11:49 AM	Helium valve opened
8/18/2012	8:11:49 AM	Helium MFC set to  500.000000
8/18/2012	8:11:49 AM	H2 MFC set to  0.000000
8/18/2012	8:11:49 AM	BCl3 MFC set to  0.000000
8/18/2012	8:11:49 AM	PH3 MFC set to  0.000000
8/18/2012	8:11:49 AM	SiCl4 MFC set to  0.000000
8/18/2012	8:11:49 AM	Bypass solenoid MFC set to  0.000000
8/18/2012	8:11:49 AM	Tube furnace set to 0
8/18/2012	8:13:01 AM	Helium valve closed
8/18/2012	8:13:01 AM	H2 valve closed
8/18/2012	8:13:01 AM	BCl3 valve closed
8/18/2012	8:13:01 AM	PH3 valve closed
8/18/2012	8:13:01 AM	SiCl4 pre valve closed
8/18/2012	8:13:01 AM	SiCl4 post valve closed
8/18/2012	8:13:01 AM	Main Vac valve closed
8/18/2012	8:13:01 AM	Bypass valve closed
8/18/2012	8:13:01 AM	Bubbler valve closed
8/18/2012	8:13:01 AM	Helium MFC set to  0.000000
8/18/2012	8:13:01 AM	H2 MFC set to  0.000000
8/18/2012	8:13:01 AM	BCl3 MFC set to  0.000000
8/18/2012	8:13:01 AM	PH3 MFC set to  0.000000
8/18/2012	8:13:01 AM	SiCl4 MFC set to  0.000000
8/18/2012	8:13:01 AM	Bypass solenoid MFC set to  0.000000
8/18/2012	8:13:02 AM	Tube furnace set to 0
8/18/2012	8:13:02 AM	Run finished at 8:13 AM
8/18/2012	8:13:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/18/2012	8:17:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2012	8:17:40 AM	Recipe started at 8:17 AM
8/18/2012	8:17:40 AM	Helium valve closed
8/18/2012	8:17:40 AM	H2 valve closed
8/18/2012	8:17:40 AM	BCl3 valve closed
8/18/2012	8:17:40 AM	PH3 valve closed
8/18/2012	8:17:40 AM	SiCl4 pre valve closed
8/18/2012	8:17:40 AM	SiCl4 post valve closed
8/18/2012	8:17:40 AM	Main Vac valve closed
8/18/2012	8:17:40 AM	Bubbler valve closed
8/18/2012	8:17:40 AM	Bypass valve opened
8/18/2012	8:17:40 AM	Helium MFC set to  0.000000
8/18/2012	8:17:40 AM	H2 MFC set to  0.000000
8/18/2012	8:17:40 AM	BCl3 MFC set to  0.000000
8/18/2012	8:17:40 AM	PH3 MFC set to  0.000000
8/18/2012	8:17:40 AM	SiCl4 MFC set to  0.000000
8/18/2012	8:17:40 AM	Bypass solenoid MFC set to  0.000000
8/18/2012	8:17:40 AM	Tube furnace set to 0
8/18/2012	8:19:01 AM	Helium valve closed
8/18/2012	8:19:01 AM	H2 valve closed
8/18/2012	8:19:01 AM	BCl3 valve closed
8/18/2012	8:19:01 AM	PH3 valve closed
8/18/2012	8:19:01 AM	SiCl4 pre valve closed
8/18/2012	8:19:01 AM	SiCl4 post valve closed
8/18/2012	8:19:01 AM	Main Vac valve closed
8/18/2012	8:19:01 AM	Bubbler valve closed
8/18/2012	8:19:01 AM	Bypass valve opened
8/18/2012	8:19:01 AM	Helium MFC set to  0.000000
8/18/2012	8:19:01 AM	H2 MFC set to  0.000000
8/18/2012	8:19:01 AM	BCl3 MFC set to  0.000000
8/18/2012	8:19:01 AM	PH3 MFC set to  0.000000
8/18/2012	8:19:01 AM	SiCl4 MFC set to  0.000000
8/18/2012	8:19:01 AM	Bypass solenoid MFC set to  0.000000
8/18/2012	8:19:01 AM	Tube furnace set to 0
8/18/2012	8:20:01 AM	Helium valve closed
8/18/2012	8:20:01 AM	H2 valve closed
8/18/2012	8:20:01 AM	BCl3 valve closed
8/18/2012	8:20:01 AM	PH3 valve closed
8/18/2012	8:20:01 AM	SiCl4 pre valve closed
8/18/2012	8:20:01 AM	SiCl4 post valve closed
8/18/2012	8:20:01 AM	Bypass valve closed
8/18/2012	8:20:01 AM	Bubbler valve closed
8/18/2012	8:20:01 AM	Main Vac valve opened
8/18/2012	8:20:01 AM	Helium MFC set to  0.000000
8/18/2012	8:20:01 AM	H2 MFC set to  0.000000
8/18/2012	8:20:01 AM	BCl3 MFC set to  0.000000
8/18/2012	8:20:01 AM	PH3 MFC set to  0.000000
8/18/2012	8:20:01 AM	SiCl4 MFC set to  0.000000
8/18/2012	8:20:01 AM	Bypass solenoid MFC set to  0.000000
8/18/2012	8:20:01 AM	Tube furnace set to 0
8/18/2012	8:20:02 AM	Run finished at 8:20 AM
8/18/2012	8:20:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2012	3:41:44 PM	Recipe started at 3:41 PM
8/18/2012	3:41:44 PM	Helium valve closed
8/18/2012	3:41:44 PM	H2 valve closed
8/18/2012	3:41:44 PM	BCl3 valve closed
8/18/2012	3:41:44 PM	PH3 valve closed
8/18/2012	3:41:44 PM	SiCl4 pre valve closed
8/18/2012	3:41:44 PM	SiCl4 post valve closed
8/18/2012	3:41:44 PM	Main Vac valve closed
8/18/2012	3:41:44 PM	Bypass valve closed
8/18/2012	3:41:44 PM	Bubbler valve closed
8/18/2012	3:41:44 PM	Helium MFC set to  0.000000
8/18/2012	3:41:44 PM	H2 MFC set to  0.000000
8/18/2012	3:41:44 PM	BCl3 MFC set to  0.000000
8/18/2012	3:41:44 PM	PH3 MFC set to  0.000000
8/18/2012	3:41:44 PM	SiCl4 MFC set to  0.000000
8/18/2012	3:41:44 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	3:41:44 PM	Tube furnace set to 0
8/18/2012	3:41:47 PM	Helium valve closed
8/18/2012	3:41:47 PM	BCl3 valve closed
8/18/2012	3:41:47 PM	PH3 valve closed
8/18/2012	3:41:47 PM	SiCl4 pre valve closed
8/18/2012	3:41:47 PM	SiCl4 post valve closed
8/18/2012	3:41:47 PM	Main Vac valve closed
8/18/2012	3:41:47 PM	Bypass valve closed
8/18/2012	3:41:47 PM	Bubbler valve closed
8/18/2012	3:41:47 PM	H2 valve opened
8/18/2012	3:41:47 PM	Helium MFC set to  0.000000
8/18/2012	3:41:47 PM	H2 MFC set to  500.000000
8/18/2012	3:41:47 PM	BCl3 MFC set to  0.000000
8/18/2012	3:41:47 PM	PH3 MFC set to  0.000000
8/18/2012	3:41:47 PM	SiCl4 MFC set to  0.000000
8/18/2012	3:41:47 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	3:41:47 PM	Tube furnace set to 50
8/18/2012	3:43:02 PM	Helium valve closed
8/18/2012	3:43:02 PM	BCl3 valve closed
8/18/2012	3:43:02 PM	PH3 valve closed
8/18/2012	3:43:02 PM	SiCl4 pre valve closed
8/18/2012	3:43:02 PM	SiCl4 post valve closed
8/18/2012	3:43:02 PM	Main Vac valve closed
8/18/2012	3:43:02 PM	Bypass valve closed
8/18/2012	3:43:02 PM	H2 valve opened
8/18/2012	3:43:02 PM	Bubbler valve opened
8/18/2012	3:43:02 PM	Helium MFC set to  0.000000
8/18/2012	3:43:02 PM	H2 MFC set to  500.000000
8/18/2012	3:43:02 PM	BCl3 MFC set to  0.000000
8/18/2012	3:43:02 PM	PH3 MFC set to  0.000000
8/18/2012	3:43:02 PM	SiCl4 MFC set to  0.000000
8/18/2012	3:43:02 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	3:43:03 PM	Tube furnace set to 50
8/18/2012	3:43:04 PM	Helium valve closed
8/18/2012	3:43:04 PM	BCl3 valve closed
8/18/2012	3:43:04 PM	PH3 valve closed
8/18/2012	3:43:04 PM	SiCl4 pre valve closed
8/18/2012	3:43:04 PM	SiCl4 post valve closed
8/18/2012	3:43:04 PM	Main Vac valve closed
8/18/2012	3:43:04 PM	Bypass valve closed
8/18/2012	3:43:04 PM	H2 valve opened
8/18/2012	3:43:04 PM	Bubbler valve opened
8/18/2012	3:43:04 PM	Helium MFC set to  0.000000
8/18/2012	3:43:04 PM	H2 MFC set to  500.000000
8/18/2012	3:43:04 PM	BCl3 MFC set to  0.000000
8/18/2012	3:43:04 PM	PH3 MFC set to  0.000000
8/18/2012	3:43:04 PM	SiCl4 MFC set to  0.000000
8/18/2012	3:43:04 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	3:43:04 PM	Tube furnace set to 1000
8/18/2012	4:03:04 PM	Helium valve closed
8/18/2012	4:03:04 PM	PH3 valve closed
8/18/2012	4:03:04 PM	Main Vac valve closed
8/18/2012	4:03:04 PM	Bypass valve closed
8/18/2012	4:03:04 PM	H2 valve opened
8/18/2012	4:03:04 PM	BCl3 valve opened
8/18/2012	4:03:04 PM	SiCl4 pre valve opened
8/18/2012	4:03:04 PM	SiCl4 post valve opened
8/18/2012	4:03:04 PM	Bubbler valve opened
8/18/2012	4:03:04 PM	Helium MFC set to  0.000000
8/18/2012	4:03:04 PM	H2 MFC set to  500.000000
8/18/2012	4:03:04 PM	BCl3 MFC set to  1.000000
8/18/2012	4:03:04 PM	PH3 MFC set to  0.000000
8/18/2012	4:03:04 PM	SiCl4 MFC set to  50.000000
8/18/2012	4:03:04 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	4:03:04 PM	Tube furnace set to 1000
8/18/2012	4:23:04 PM	Helium valve closed
8/18/2012	4:23:04 PM	BCl3 valve closed
8/18/2012	4:23:04 PM	PH3 valve closed
8/18/2012	4:23:04 PM	SiCl4 pre valve closed
8/18/2012	4:23:04 PM	SiCl4 post valve closed
8/18/2012	4:23:04 PM	Main Vac valve closed
8/18/2012	4:23:04 PM	Bypass valve closed
8/18/2012	4:23:04 PM	H2 valve opened
8/18/2012	4:23:04 PM	Bubbler valve opened
8/18/2012	4:23:04 PM	Helium MFC set to  0.000000
8/18/2012	4:23:04 PM	H2 MFC set to  500.000000
8/18/2012	4:23:04 PM	BCl3 MFC set to  0.000000
8/18/2012	4:23:04 PM	PH3 MFC set to  0.000000
8/18/2012	4:23:04 PM	SiCl4 MFC set to  0.000000
8/18/2012	4:23:04 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	4:23:04 PM	Tube furnace set to 950
8/18/2012	4:26:04 PM	Helium valve closed
8/18/2012	4:26:04 PM	BCl3 valve closed
8/18/2012	4:26:04 PM	PH3 valve closed
8/18/2012	4:26:04 PM	SiCl4 pre valve closed
8/18/2012	4:26:04 PM	SiCl4 post valve closed
8/18/2012	4:26:04 PM	Main Vac valve closed
8/18/2012	4:26:04 PM	Bypass valve closed
8/18/2012	4:26:04 PM	H2 valve opened
8/18/2012	4:26:04 PM	Bubbler valve opened
8/18/2012	4:26:04 PM	Helium MFC set to  0.000000
8/18/2012	4:26:04 PM	H2 MFC set to  500.000000
8/18/2012	4:26:04 PM	BCl3 MFC set to  0.000000
8/18/2012	4:26:04 PM	PH3 MFC set to  0.000000
8/18/2012	4:26:04 PM	SiCl4 MFC set to  0.000000
8/18/2012	4:26:04 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	4:26:04 PM	Tube furnace set to 900
8/18/2012	4:29:04 PM	Helium valve closed
8/18/2012	4:29:04 PM	BCl3 valve closed
8/18/2012	4:29:04 PM	PH3 valve closed
8/18/2012	4:29:04 PM	SiCl4 pre valve closed
8/18/2012	4:29:04 PM	SiCl4 post valve closed
8/18/2012	4:29:04 PM	Main Vac valve closed
8/18/2012	4:29:04 PM	Bypass valve closed
8/18/2012	4:29:04 PM	H2 valve opened
8/18/2012	4:29:04 PM	Bubbler valve opened
8/18/2012	4:29:05 PM	Helium MFC set to  0.000000
8/18/2012	4:29:05 PM	H2 MFC set to  500.000000
8/18/2012	4:29:05 PM	BCl3 MFC set to  0.000000
8/18/2012	4:29:05 PM	PH3 MFC set to  0.000000
8/18/2012	4:29:05 PM	SiCl4 MFC set to  0.000000
8/18/2012	4:29:05 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	4:29:05 PM	Tube furnace set to 850
8/18/2012	4:32:05 PM	Helium valve closed
8/18/2012	4:32:05 PM	BCl3 valve closed
8/18/2012	4:32:05 PM	PH3 valve closed
8/18/2012	4:32:05 PM	SiCl4 pre valve closed
8/18/2012	4:32:05 PM	SiCl4 post valve closed
8/18/2012	4:32:05 PM	Main Vac valve closed
8/18/2012	4:32:05 PM	Bypass valve closed
8/18/2012	4:32:05 PM	H2 valve opened
8/18/2012	4:32:05 PM	Bubbler valve opened
8/18/2012	4:32:05 PM	Helium MFC set to  0.000000
8/18/2012	4:32:05 PM	H2 MFC set to  500.000000
8/18/2012	4:32:05 PM	BCl3 MFC set to  0.000000
8/18/2012	4:32:05 PM	PH3 MFC set to  0.000000
8/18/2012	4:32:05 PM	SiCl4 MFC set to  0.000000
8/18/2012	4:32:05 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	4:32:05 PM	Tube furnace set to 800
8/18/2012	4:35:05 PM	Helium valve closed
8/18/2012	4:35:05 PM	BCl3 valve closed
8/18/2012	4:35:05 PM	PH3 valve closed
8/18/2012	4:35:05 PM	SiCl4 pre valve closed
8/18/2012	4:35:05 PM	SiCl4 post valve closed
8/18/2012	4:35:05 PM	Main Vac valve closed
8/18/2012	4:35:05 PM	Bypass valve closed
8/18/2012	4:35:05 PM	H2 valve opened
8/18/2012	4:35:05 PM	Bubbler valve opened
8/18/2012	4:35:05 PM	Helium MFC set to  0.000000
8/18/2012	4:35:05 PM	H2 MFC set to  500.000000
8/18/2012	4:35:05 PM	BCl3 MFC set to  0.000000
8/18/2012	4:35:05 PM	PH3 MFC set to  0.000000
8/18/2012	4:35:05 PM	SiCl4 MFC set to  0.000000
8/18/2012	4:35:05 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	4:35:05 PM	Tube furnace set to 750
8/18/2012	4:38:05 PM	H2 valve closed
8/18/2012	4:38:05 PM	BCl3 valve closed
8/18/2012	4:38:05 PM	PH3 valve closed
8/18/2012	4:38:05 PM	SiCl4 pre valve closed
8/18/2012	4:38:05 PM	SiCl4 post valve closed
8/18/2012	4:38:05 PM	Main Vac valve closed
8/18/2012	4:38:05 PM	Bypass valve closed
8/18/2012	4:38:05 PM	Helium valve opened
8/18/2012	4:38:05 PM	Bubbler valve opened
8/18/2012	4:38:05 PM	Helium MFC set to  400.000000
8/18/2012	4:38:05 PM	H2 MFC set to  0.000000
8/18/2012	4:38:05 PM	BCl3 MFC set to  0.000000
8/18/2012	4:38:05 PM	PH3 MFC set to  0.000000
8/18/2012	4:38:05 PM	SiCl4 MFC set to  0.000000
8/18/2012	4:38:05 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	4:38:05 PM	Tube furnace set to 0
8/18/2012	4:48:47 PM	Helium valve closed
8/18/2012	4:48:47 PM	H2 valve closed
8/18/2012	4:48:47 PM	BCl3 valve closed
8/18/2012	4:48:47 PM	PH3 valve closed
8/18/2012	4:48:47 PM	SiCl4 pre valve closed
8/18/2012	4:48:47 PM	SiCl4 post valve closed
8/18/2012	4:48:47 PM	Main Vac valve closed
8/18/2012	4:48:47 PM	Bypass valve closed
8/18/2012	4:48:47 PM	Bubbler valve closed
8/18/2012	4:48:47 PM	Helium MFC set to  0.000000
8/18/2012	4:48:47 PM	H2 MFC set to  0.000000
8/18/2012	4:48:47 PM	BCl3 MFC set to  0.000000
8/18/2012	4:48:47 PM	PH3 MFC set to  0.000000
8/18/2012	4:48:47 PM	SiCl4 MFC set to  0.000000
8/18/2012	4:48:47 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	4:48:47 PM	Tube furnace set to 50
8/18/2012	4:48:48 PM	Helium valve closed
8/18/2012	4:48:48 PM	H2 valve closed
8/18/2012	4:48:48 PM	BCl3 valve closed
8/18/2012	4:48:48 PM	PH3 valve closed
8/18/2012	4:48:48 PM	SiCl4 pre valve closed
8/18/2012	4:48:48 PM	SiCl4 post valve closed
8/18/2012	4:48:48 PM	Main Vac valve closed
8/18/2012	4:48:48 PM	Bubbler valve closed
8/18/2012	4:48:48 PM	Bypass valve opened
8/18/2012	4:48:48 PM	Helium MFC set to  0.000000
8/18/2012	4:48:48 PM	H2 MFC set to  0.000000
8/18/2012	4:48:48 PM	BCl3 MFC set to  0.000000
8/18/2012	4:48:48 PM	PH3 MFC set to  0.000000
8/18/2012	4:48:48 PM	SiCl4 MFC set to  0.000000
8/18/2012	4:48:48 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	4:48:49 PM	Tube furnace set to 0
8/18/2012	4:49:48 PM	Helium valve closed
8/18/2012	4:49:48 PM	H2 valve closed
8/18/2012	4:49:48 PM	BCl3 valve closed
8/18/2012	4:49:48 PM	PH3 valve closed
8/18/2012	4:49:48 PM	SiCl4 pre valve closed
8/18/2012	4:49:48 PM	SiCl4 post valve closed
8/18/2012	4:49:48 PM	Bypass valve closed
8/18/2012	4:49:48 PM	Bubbler valve closed
8/18/2012	4:49:48 PM	Main Vac valve opened
8/18/2012	4:49:48 PM	Helium MFC set to  0.000000
8/18/2012	4:49:48 PM	H2 MFC set to  0.000000
8/18/2012	4:49:48 PM	BCl3 MFC set to  0.000000
8/18/2012	4:49:48 PM	PH3 MFC set to  0.000000
8/18/2012	4:49:48 PM	SiCl4 MFC set to  0.000000
8/18/2012	4:49:48 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	4:49:48 PM	Tube furnace set to 0
8/18/2012	4:49:49 PM	Run finished at 4:49 PM
8/18/2012	4:50:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/18/2012	4:50:36 PM	Recipe started at 4:50 PM
8/18/2012	4:50:36 PM	Helium valve closed
8/18/2012	4:50:36 PM	H2 valve closed
8/18/2012	4:50:36 PM	BCl3 valve closed
8/18/2012	4:50:36 PM	PH3 valve closed
8/18/2012	4:50:36 PM	SiCl4 pre valve closed
8/18/2012	4:50:36 PM	SiCl4 post valve closed
8/18/2012	4:50:36 PM	Main Vac valve closed
8/18/2012	4:50:36 PM	Bypass valve closed
8/18/2012	4:50:36 PM	Bubbler valve closed
8/18/2012	4:50:36 PM	Helium MFC set to  0.000000
8/18/2012	4:50:36 PM	H2 MFC set to  0.000000
8/18/2012	4:50:36 PM	BCl3 MFC set to  0.000000
8/18/2012	4:50:36 PM	PH3 MFC set to  0.000000
8/18/2012	4:50:36 PM	SiCl4 MFC set to  0.000000
8/18/2012	4:50:36 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	4:50:36 PM	Tube furnace set to 0
8/18/2012	4:50:39 PM	H2 valve closed
8/18/2012	4:50:39 PM	BCl3 valve closed
8/18/2012	4:50:39 PM	PH3 valve closed
8/18/2012	4:50:39 PM	SiCl4 pre valve closed
8/18/2012	4:50:39 PM	SiCl4 post valve closed
8/18/2012	4:50:39 PM	Main Vac valve closed
8/18/2012	4:50:39 PM	Bypass valve closed
8/18/2012	4:50:39 PM	Bubbler valve closed
8/18/2012	4:50:39 PM	Helium valve opened
8/18/2012	4:50:39 PM	Helium MFC set to  500.000000
8/18/2012	4:50:40 PM	H2 MFC set to  0.000000
8/18/2012	4:50:40 PM	BCl3 MFC set to  0.000000
8/18/2012	4:50:40 PM	PH3 MFC set to  0.000000
8/18/2012	4:50:40 PM	SiCl4 MFC set to  0.000000
8/18/2012	4:50:40 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	4:50:40 PM	Tube furnace set to 0
8/18/2012	4:51:47 PM	Helium valve closed
8/18/2012	4:51:47 PM	H2 valve closed
8/18/2012	4:51:47 PM	BCl3 valve closed
8/18/2012	4:51:47 PM	PH3 valve closed
8/18/2012	4:51:47 PM	SiCl4 pre valve closed
8/18/2012	4:51:47 PM	SiCl4 post valve closed
8/18/2012	4:51:47 PM	Main Vac valve closed
8/18/2012	4:51:47 PM	Bypass valve closed
8/18/2012	4:51:47 PM	Bubbler valve closed
8/18/2012	4:51:47 PM	Helium MFC set to  0.000000
8/18/2012	4:51:47 PM	H2 MFC set to  0.000000
8/18/2012	4:51:47 PM	BCl3 MFC set to  0.000000
8/18/2012	4:51:47 PM	PH3 MFC set to  0.000000
8/18/2012	4:51:47 PM	SiCl4 MFC set to  0.000000
8/18/2012	4:51:47 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	4:51:47 PM	Tube furnace set to 0
8/18/2012	4:51:48 PM	Run finished at 4:51 PM
8/18/2012	4:51:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/18/2012	4:57:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2012	4:57:39 PM	Recipe started at 4:57 PM
8/18/2012	4:57:39 PM	Helium valve closed
8/18/2012	4:57:39 PM	H2 valve closed
8/18/2012	4:57:39 PM	BCl3 valve closed
8/18/2012	4:57:39 PM	PH3 valve closed
8/18/2012	4:57:39 PM	SiCl4 pre valve closed
8/18/2012	4:57:39 PM	SiCl4 post valve closed
8/18/2012	4:57:39 PM	Main Vac valve closed
8/18/2012	4:57:39 PM	Bubbler valve closed
8/18/2012	4:57:39 PM	Bypass valve opened
8/18/2012	4:57:39 PM	Helium MFC set to  0.000000
8/18/2012	4:57:39 PM	H2 MFC set to  0.000000
8/18/2012	4:57:39 PM	BCl3 MFC set to  0.000000
8/18/2012	4:57:39 PM	PH3 MFC set to  0.000000
8/18/2012	4:57:39 PM	SiCl4 MFC set to  0.000000
8/18/2012	4:57:39 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	4:57:39 PM	Tube furnace set to 0
8/18/2012	4:58:56 PM	Helium valve closed
8/18/2012	4:58:56 PM	H2 valve closed
8/18/2012	4:58:56 PM	BCl3 valve closed
8/18/2012	4:58:56 PM	PH3 valve closed
8/18/2012	4:58:56 PM	SiCl4 pre valve closed
8/18/2012	4:58:56 PM	SiCl4 post valve closed
8/18/2012	4:58:56 PM	Main Vac valve closed
8/18/2012	4:58:56 PM	Bubbler valve closed
8/18/2012	4:58:56 PM	Bypass valve opened
8/18/2012	4:58:56 PM	Helium MFC set to  0.000000
8/18/2012	4:58:56 PM	H2 MFC set to  0.000000
8/18/2012	4:58:56 PM	BCl3 MFC set to  0.000000
8/18/2012	4:58:56 PM	PH3 MFC set to  0.000000
8/18/2012	4:58:56 PM	SiCl4 MFC set to  0.000000
8/18/2012	4:58:56 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	4:58:56 PM	Tube furnace set to 0
8/18/2012	4:59:56 PM	Helium valve closed
8/18/2012	4:59:56 PM	H2 valve closed
8/18/2012	4:59:56 PM	BCl3 valve closed
8/18/2012	4:59:56 PM	PH3 valve closed
8/18/2012	4:59:56 PM	SiCl4 pre valve closed
8/18/2012	4:59:56 PM	SiCl4 post valve closed
8/18/2012	4:59:56 PM	Bypass valve closed
8/18/2012	4:59:56 PM	Bubbler valve closed
8/18/2012	4:59:56 PM	Main Vac valve opened
8/18/2012	4:59:56 PM	Helium MFC set to  0.000000
8/18/2012	4:59:56 PM	H2 MFC set to  0.000000
8/18/2012	4:59:56 PM	BCl3 MFC set to  0.000000
8/18/2012	4:59:56 PM	PH3 MFC set to  0.000000
8/18/2012	4:59:56 PM	SiCl4 MFC set to  0.000000
8/18/2012	4:59:56 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	4:59:56 PM	Tube furnace set to 0
8/18/2012	4:59:57 PM	Run finished at 4:59 PM
8/18/2012	4:59:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2012	5:45:32 PM	Recipe started at 5:45 PM
8/18/2012	5:45:32 PM	Helium valve closed
8/18/2012	5:45:32 PM	H2 valve closed
8/18/2012	5:45:32 PM	BCl3 valve closed
8/18/2012	5:45:32 PM	PH3 valve closed
8/18/2012	5:45:32 PM	SiCl4 pre valve closed
8/18/2012	5:45:32 PM	SiCl4 post valve closed
8/18/2012	5:45:32 PM	Main Vac valve closed
8/18/2012	5:45:32 PM	Bypass valve closed
8/18/2012	5:45:32 PM	Bubbler valve closed
8/18/2012	5:45:32 PM	Helium MFC set to  0.000000
8/18/2012	5:45:32 PM	H2 MFC set to  0.000000
8/18/2012	5:45:32 PM	BCl3 MFC set to  0.000000
8/18/2012	5:45:32 PM	PH3 MFC set to  0.000000
8/18/2012	5:45:32 PM	SiCl4 MFC set to  0.000000
8/18/2012	5:45:32 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	5:45:32 PM	Tube furnace set to 0
8/18/2012	5:45:35 PM	Helium valve closed
8/18/2012	5:45:35 PM	BCl3 valve closed
8/18/2012	5:45:35 PM	PH3 valve closed
8/18/2012	5:45:35 PM	SiCl4 pre valve closed
8/18/2012	5:45:35 PM	SiCl4 post valve closed
8/18/2012	5:45:35 PM	Main Vac valve closed
8/18/2012	5:45:35 PM	Bypass valve closed
8/18/2012	5:45:35 PM	Bubbler valve closed
8/18/2012	5:45:35 PM	H2 valve opened
8/18/2012	5:45:35 PM	Helium MFC set to  0.000000
8/18/2012	5:45:35 PM	H2 MFC set to  500.000000
8/18/2012	5:45:35 PM	BCl3 MFC set to  0.000000
8/18/2012	5:45:35 PM	PH3 MFC set to  0.000000
8/18/2012	5:45:35 PM	SiCl4 MFC set to  0.000000
8/18/2012	5:45:35 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	5:45:35 PM	Tube furnace set to 50
8/18/2012	5:46:46 PM	Helium valve closed
8/18/2012	5:46:46 PM	BCl3 valve closed
8/18/2012	5:46:46 PM	PH3 valve closed
8/18/2012	5:46:46 PM	SiCl4 pre valve closed
8/18/2012	5:46:46 PM	SiCl4 post valve closed
8/18/2012	5:46:46 PM	Main Vac valve closed
8/18/2012	5:46:46 PM	Bypass valve closed
8/18/2012	5:46:46 PM	H2 valve opened
8/18/2012	5:46:46 PM	Bubbler valve opened
8/18/2012	5:46:46 PM	Helium MFC set to  0.000000
8/18/2012	5:46:46 PM	H2 MFC set to  500.000000
8/18/2012	5:46:46 PM	BCl3 MFC set to  0.000000
8/18/2012	5:46:46 PM	PH3 MFC set to  0.000000
8/18/2012	5:46:46 PM	SiCl4 MFC set to  0.000000
8/18/2012	5:46:46 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	5:46:46 PM	Tube furnace set to 50
8/18/2012	5:46:47 PM	Helium valve closed
8/18/2012	5:46:47 PM	BCl3 valve closed
8/18/2012	5:46:47 PM	PH3 valve closed
8/18/2012	5:46:47 PM	SiCl4 pre valve closed
8/18/2012	5:46:47 PM	SiCl4 post valve closed
8/18/2012	5:46:47 PM	Main Vac valve closed
8/18/2012	5:46:47 PM	Bypass valve closed
8/18/2012	5:46:47 PM	H2 valve opened
8/18/2012	5:46:47 PM	Bubbler valve opened
8/18/2012	5:46:47 PM	Helium MFC set to  0.000000
8/18/2012	5:46:47 PM	H2 MFC set to  500.000000
8/18/2012	5:46:47 PM	BCl3 MFC set to  0.000000
8/18/2012	5:46:47 PM	PH3 MFC set to  0.000000
8/18/2012	5:46:47 PM	SiCl4 MFC set to  0.000000
8/18/2012	5:46:47 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	5:46:47 PM	Tube furnace set to 1000
8/18/2012	6:06:47 PM	Helium valve closed
8/18/2012	6:06:47 PM	PH3 valve closed
8/18/2012	6:06:47 PM	Main Vac valve closed
8/18/2012	6:06:47 PM	Bypass valve closed
8/18/2012	6:06:47 PM	H2 valve opened
8/18/2012	6:06:47 PM	BCl3 valve opened
8/18/2012	6:06:47 PM	SiCl4 pre valve opened
8/18/2012	6:06:47 PM	SiCl4 post valve opened
8/18/2012	6:06:47 PM	Bubbler valve opened
8/18/2012	6:06:48 PM	Helium MFC set to  0.000000
8/18/2012	6:06:48 PM	H2 MFC set to  500.000000
8/18/2012	6:06:48 PM	BCl3 MFC set to  1.000000
8/18/2012	6:06:48 PM	PH3 MFC set to  0.000000
8/18/2012	6:06:48 PM	SiCl4 MFC set to  50.000000
8/18/2012	6:06:48 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	6:06:48 PM	Tube furnace set to 1000
8/18/2012	6:26:48 PM	Helium valve closed
8/18/2012	6:26:48 PM	BCl3 valve closed
8/18/2012	6:26:48 PM	PH3 valve closed
8/18/2012	6:26:48 PM	SiCl4 pre valve closed
8/18/2012	6:26:48 PM	SiCl4 post valve closed
8/18/2012	6:26:48 PM	Main Vac valve closed
8/18/2012	6:26:48 PM	Bypass valve closed
8/18/2012	6:26:48 PM	H2 valve opened
8/18/2012	6:26:48 PM	Bubbler valve opened
8/18/2012	6:26:48 PM	Helium MFC set to  0.000000
8/18/2012	6:26:48 PM	H2 MFC set to  500.000000
8/18/2012	6:26:48 PM	BCl3 MFC set to  0.000000
8/18/2012	6:26:48 PM	PH3 MFC set to  0.000000
8/18/2012	6:26:48 PM	SiCl4 MFC set to  0.000000
8/18/2012	6:26:48 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	6:26:48 PM	Tube furnace set to 950
8/18/2012	6:29:48 PM	Helium valve closed
8/18/2012	6:29:48 PM	BCl3 valve closed
8/18/2012	6:29:48 PM	PH3 valve closed
8/18/2012	6:29:48 PM	SiCl4 pre valve closed
8/18/2012	6:29:48 PM	SiCl4 post valve closed
8/18/2012	6:29:48 PM	Main Vac valve closed
8/18/2012	6:29:48 PM	Bypass valve closed
8/18/2012	6:29:48 PM	H2 valve opened
8/18/2012	6:29:48 PM	Bubbler valve opened
8/18/2012	6:29:48 PM	Helium MFC set to  0.000000
8/18/2012	6:29:48 PM	H2 MFC set to  500.000000
8/18/2012	6:29:48 PM	BCl3 MFC set to  0.000000
8/18/2012	6:29:48 PM	PH3 MFC set to  0.000000
8/18/2012	6:29:48 PM	SiCl4 MFC set to  0.000000
8/18/2012	6:29:48 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	6:29:48 PM	Tube furnace set to 900
8/18/2012	6:32:48 PM	Helium valve closed
8/18/2012	6:32:48 PM	BCl3 valve closed
8/18/2012	6:32:48 PM	PH3 valve closed
8/18/2012	6:32:48 PM	SiCl4 pre valve closed
8/18/2012	6:32:48 PM	SiCl4 post valve closed
8/18/2012	6:32:48 PM	Main Vac valve closed
8/18/2012	6:32:48 PM	Bypass valve closed
8/18/2012	6:32:48 PM	H2 valve opened
8/18/2012	6:32:48 PM	Bubbler valve opened
8/18/2012	6:32:48 PM	Helium MFC set to  0.000000
8/18/2012	6:32:48 PM	H2 MFC set to  500.000000
8/18/2012	6:32:48 PM	BCl3 MFC set to  0.000000
8/18/2012	6:32:48 PM	PH3 MFC set to  0.000000
8/18/2012	6:32:48 PM	SiCl4 MFC set to  0.000000
8/18/2012	6:32:48 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	6:32:48 PM	Tube furnace set to 850
8/18/2012	6:35:48 PM	Helium valve closed
8/18/2012	6:35:48 PM	BCl3 valve closed
8/18/2012	6:35:48 PM	PH3 valve closed
8/18/2012	6:35:49 PM	SiCl4 pre valve closed
8/18/2012	6:35:49 PM	SiCl4 post valve closed
8/18/2012	6:35:49 PM	Main Vac valve closed
8/18/2012	6:35:49 PM	Bypass valve closed
8/18/2012	6:35:49 PM	H2 valve opened
8/18/2012	6:35:49 PM	Bubbler valve opened
8/18/2012	6:35:49 PM	Helium MFC set to  0.000000
8/18/2012	6:35:49 PM	H2 MFC set to  500.000000
8/18/2012	6:35:49 PM	BCl3 MFC set to  0.000000
8/18/2012	6:35:49 PM	PH3 MFC set to  0.000000
8/18/2012	6:35:49 PM	SiCl4 MFC set to  0.000000
8/18/2012	6:35:49 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	6:35:49 PM	Tube furnace set to 800
8/18/2012	6:38:49 PM	Helium valve closed
8/18/2012	6:38:49 PM	BCl3 valve closed
8/18/2012	6:38:49 PM	PH3 valve closed
8/18/2012	6:38:49 PM	SiCl4 pre valve closed
8/18/2012	6:38:49 PM	SiCl4 post valve closed
8/18/2012	6:38:49 PM	Main Vac valve closed
8/18/2012	6:38:49 PM	Bypass valve closed
8/18/2012	6:38:49 PM	H2 valve opened
8/18/2012	6:38:49 PM	Bubbler valve opened
8/18/2012	6:38:49 PM	Helium MFC set to  0.000000
8/18/2012	6:38:49 PM	H2 MFC set to  500.000000
8/18/2012	6:38:49 PM	BCl3 MFC set to  0.000000
8/18/2012	6:38:49 PM	PH3 MFC set to  0.000000
8/18/2012	6:38:49 PM	SiCl4 MFC set to  0.000000
8/18/2012	6:38:49 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	6:38:49 PM	Tube furnace set to 750
8/18/2012	6:41:49 PM	H2 valve closed
8/18/2012	6:41:49 PM	BCl3 valve closed
8/18/2012	6:41:49 PM	PH3 valve closed
8/18/2012	6:41:49 PM	SiCl4 pre valve closed
8/18/2012	6:41:49 PM	SiCl4 post valve closed
8/18/2012	6:41:49 PM	Main Vac valve closed
8/18/2012	6:41:49 PM	Bypass valve closed
8/18/2012	6:41:49 PM	Helium valve opened
8/18/2012	6:41:49 PM	Bubbler valve opened
8/18/2012	6:41:49 PM	Helium MFC set to  400.000000
8/18/2012	6:41:49 PM	H2 MFC set to  0.000000
8/18/2012	6:41:49 PM	BCl3 MFC set to  0.000000
8/18/2012	6:41:49 PM	PH3 MFC set to  0.000000
8/18/2012	6:41:49 PM	SiCl4 MFC set to  0.000000
8/18/2012	6:41:49 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	6:41:49 PM	Tube furnace set to 0
8/18/2012	6:51:24 PM	Helium valve closed
8/18/2012	6:51:24 PM	H2 valve closed
8/18/2012	6:51:24 PM	BCl3 valve closed
8/18/2012	6:51:24 PM	PH3 valve closed
8/18/2012	6:51:24 PM	SiCl4 pre valve closed
8/18/2012	6:51:24 PM	SiCl4 post valve closed
8/18/2012	6:51:24 PM	Main Vac valve closed
8/18/2012	6:51:24 PM	Bypass valve closed
8/18/2012	6:51:24 PM	Bubbler valve closed
8/18/2012	6:51:24 PM	Helium MFC set to  0.000000
8/18/2012	6:51:24 PM	H2 MFC set to  0.000000
8/18/2012	6:51:24 PM	BCl3 MFC set to  0.000000
8/18/2012	6:51:24 PM	PH3 MFC set to  0.000000
8/18/2012	6:51:24 PM	SiCl4 MFC set to  0.000000
8/18/2012	6:51:24 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	6:51:24 PM	Tube furnace set to 50
8/18/2012	6:51:28 PM	Helium valve closed
8/18/2012	6:51:28 PM	H2 valve closed
8/18/2012	6:51:28 PM	BCl3 valve closed
8/18/2012	6:51:28 PM	PH3 valve closed
8/18/2012	6:51:28 PM	SiCl4 pre valve closed
8/18/2012	6:51:28 PM	SiCl4 post valve closed
8/18/2012	6:51:28 PM	Main Vac valve closed
8/18/2012	6:51:28 PM	Bubbler valve closed
8/18/2012	6:51:28 PM	Bypass valve opened
8/18/2012	6:51:28 PM	Helium MFC set to  0.000000
8/18/2012	6:51:28 PM	H2 MFC set to  0.000000
8/18/2012	6:51:28 PM	BCl3 MFC set to  0.000000
8/18/2012	6:51:28 PM	PH3 MFC set to  0.000000
8/18/2012	6:51:28 PM	SiCl4 MFC set to  0.000000
8/18/2012	6:51:28 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	6:51:28 PM	Tube furnace set to 0
8/18/2012	6:52:26 PM	Helium valve closed
8/18/2012	6:52:26 PM	H2 valve closed
8/18/2012	6:52:26 PM	BCl3 valve closed
8/18/2012	6:52:26 PM	PH3 valve closed
8/18/2012	6:52:26 PM	SiCl4 pre valve closed
8/18/2012	6:52:26 PM	SiCl4 post valve closed
8/18/2012	6:52:26 PM	Bypass valve closed
8/18/2012	6:52:26 PM	Bubbler valve closed
8/18/2012	6:52:26 PM	Main Vac valve opened
8/18/2012	6:52:26 PM	Helium MFC set to  0.000000
8/18/2012	6:52:26 PM	H2 MFC set to  0.000000
8/18/2012	6:52:26 PM	BCl3 MFC set to  0.000000
8/18/2012	6:52:26 PM	PH3 MFC set to  0.000000
8/18/2012	6:52:26 PM	SiCl4 MFC set to  0.000000
8/18/2012	6:52:26 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	6:52:27 PM	Tube furnace set to 0
8/18/2012	6:52:28 PM	Run finished at 6:52 PM
8/18/2012	6:53:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/18/2012	6:53:53 PM	Recipe started at 6:53 PM
8/18/2012	6:53:53 PM	Helium valve closed
8/18/2012	6:53:53 PM	H2 valve closed
8/18/2012	6:53:53 PM	BCl3 valve closed
8/18/2012	6:53:53 PM	PH3 valve closed
8/18/2012	6:53:53 PM	SiCl4 pre valve closed
8/18/2012	6:53:53 PM	SiCl4 post valve closed
8/18/2012	6:53:53 PM	Main Vac valve closed
8/18/2012	6:53:53 PM	Bypass valve closed
8/18/2012	6:53:53 PM	Bubbler valve closed
8/18/2012	6:53:53 PM	Helium MFC set to  0.000000
8/18/2012	6:53:53 PM	H2 MFC set to  0.000000
8/18/2012	6:53:53 PM	BCl3 MFC set to  0.000000
8/18/2012	6:53:53 PM	PH3 MFC set to  0.000000
8/18/2012	6:53:53 PM	SiCl4 MFC set to  0.000000
8/18/2012	6:53:53 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	6:53:53 PM	Tube furnace set to 0
8/18/2012	6:53:56 PM	H2 valve closed
8/18/2012	6:53:56 PM	BCl3 valve closed
8/18/2012	6:53:57 PM	PH3 valve closed
8/18/2012	6:53:57 PM	SiCl4 pre valve closed
8/18/2012	6:53:57 PM	SiCl4 post valve closed
8/18/2012	6:53:57 PM	Main Vac valve closed
8/18/2012	6:53:57 PM	Bypass valve closed
8/18/2012	6:53:57 PM	Bubbler valve closed
8/18/2012	6:53:57 PM	Helium valve opened
8/18/2012	6:53:57 PM	Helium MFC set to  500.000000
8/18/2012	6:53:57 PM	H2 MFC set to  0.000000
8/18/2012	6:53:57 PM	BCl3 MFC set to  0.000000
8/18/2012	6:53:57 PM	PH3 MFC set to  0.000000
8/18/2012	6:53:57 PM	SiCl4 MFC set to  0.000000
8/18/2012	6:53:57 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	6:53:57 PM	Tube furnace set to 0
8/18/2012	6:55:04 PM	Helium valve closed
8/18/2012	6:55:04 PM	H2 valve closed
8/18/2012	6:55:04 PM	BCl3 valve closed
8/18/2012	6:55:04 PM	PH3 valve closed
8/18/2012	6:55:04 PM	SiCl4 pre valve closed
8/18/2012	6:55:04 PM	SiCl4 post valve closed
8/18/2012	6:55:04 PM	Main Vac valve closed
8/18/2012	6:55:04 PM	Bypass valve closed
8/18/2012	6:55:04 PM	Bubbler valve closed
8/18/2012	6:55:04 PM	Helium MFC set to  0.000000
8/18/2012	6:55:04 PM	H2 MFC set to  0.000000
8/18/2012	6:55:04 PM	BCl3 MFC set to  0.000000
8/18/2012	6:55:04 PM	PH3 MFC set to  0.000000
8/18/2012	6:55:04 PM	SiCl4 MFC set to  0.000000
8/18/2012	6:55:04 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	6:55:04 PM	Tube furnace set to 0
8/18/2012	6:55:05 PM	Run finished at 6:55 PM
8/18/2012	6:55:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/18/2012	6:58:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2012	6:58:48 PM	Recipe started at 6:58 PM
8/18/2012	6:58:48 PM	Helium valve closed
8/18/2012	6:58:48 PM	H2 valve closed
8/18/2012	6:58:48 PM	BCl3 valve closed
8/18/2012	6:58:48 PM	PH3 valve closed
8/18/2012	6:58:48 PM	SiCl4 pre valve closed
8/18/2012	6:58:48 PM	SiCl4 post valve closed
8/18/2012	6:58:48 PM	Main Vac valve closed
8/18/2012	6:58:48 PM	Bubbler valve closed
8/18/2012	6:58:48 PM	Bypass valve opened
8/18/2012	6:58:48 PM	Helium MFC set to  0.000000
8/18/2012	6:58:48 PM	H2 MFC set to  0.000000
8/18/2012	6:58:48 PM	BCl3 MFC set to  0.000000
8/18/2012	6:58:48 PM	PH3 MFC set to  0.000000
8/18/2012	6:58:48 PM	SiCl4 MFC set to  0.000000
8/18/2012	6:58:48 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	6:58:48 PM	Tube furnace set to 0
8/18/2012	7:00:01 PM	Helium valve closed
8/18/2012	7:00:01 PM	H2 valve closed
8/18/2012	7:00:01 PM	BCl3 valve closed
8/18/2012	7:00:01 PM	PH3 valve closed
8/18/2012	7:00:01 PM	SiCl4 pre valve closed
8/18/2012	7:00:01 PM	SiCl4 post valve closed
8/18/2012	7:00:01 PM	Main Vac valve closed
8/18/2012	7:00:01 PM	Bubbler valve closed
8/18/2012	7:00:01 PM	Bypass valve opened
8/18/2012	7:00:01 PM	Helium MFC set to  0.000000
8/18/2012	7:00:01 PM	H2 MFC set to  0.000000
8/18/2012	7:00:01 PM	BCl3 MFC set to  0.000000
8/18/2012	7:00:01 PM	PH3 MFC set to  0.000000
8/18/2012	7:00:01 PM	SiCl4 MFC set to  0.000000
8/18/2012	7:00:01 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	7:00:01 PM	Tube furnace set to 0
8/18/2012	7:01:01 PM	Helium valve closed
8/18/2012	7:01:01 PM	H2 valve closed
8/18/2012	7:01:01 PM	BCl3 valve closed
8/18/2012	7:01:01 PM	PH3 valve closed
8/18/2012	7:01:01 PM	SiCl4 pre valve closed
8/18/2012	7:01:01 PM	SiCl4 post valve closed
8/18/2012	7:01:01 PM	Bypass valve closed
8/18/2012	7:01:01 PM	Bubbler valve closed
8/18/2012	7:01:01 PM	Main Vac valve opened
8/18/2012	7:01:01 PM	Helium MFC set to  0.000000
8/18/2012	7:01:01 PM	H2 MFC set to  0.000000
8/18/2012	7:01:01 PM	BCl3 MFC set to  0.000000
8/18/2012	7:01:01 PM	PH3 MFC set to  0.000000
8/18/2012	7:01:01 PM	SiCl4 MFC set to  0.000000
8/18/2012	7:01:01 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	7:01:01 PM	Tube furnace set to 0
8/18/2012	7:01:02 PM	Run finished at 7:01 PM
8/18/2012	7:01:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2012	7:43:20 PM	Recipe started at 7:43 PM
8/18/2012	7:43:20 PM	Helium valve closed
8/18/2012	7:43:20 PM	H2 valve closed
8/18/2012	7:43:20 PM	BCl3 valve closed
8/18/2012	7:43:20 PM	PH3 valve closed
8/18/2012	7:43:20 PM	SiCl4 pre valve closed
8/18/2012	7:43:20 PM	SiCl4 post valve closed
8/18/2012	7:43:20 PM	Main Vac valve closed
8/18/2012	7:43:20 PM	Bypass valve closed
8/18/2012	7:43:20 PM	Bubbler valve closed
8/18/2012	7:43:20 PM	Helium MFC set to  0.000000
8/18/2012	7:43:20 PM	H2 MFC set to  0.000000
8/18/2012	7:43:20 PM	BCl3 MFC set to  0.000000
8/18/2012	7:43:20 PM	PH3 MFC set to  0.000000
8/18/2012	7:43:20 PM	SiCl4 MFC set to  0.000000
8/18/2012	7:43:20 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	7:43:20 PM	Tube furnace set to 0
8/18/2012	7:43:23 PM	Helium valve closed
8/18/2012	7:43:23 PM	BCl3 valve closed
8/18/2012	7:43:23 PM	PH3 valve closed
8/18/2012	7:43:23 PM	SiCl4 pre valve closed
8/18/2012	7:43:23 PM	SiCl4 post valve closed
8/18/2012	7:43:23 PM	Main Vac valve closed
8/18/2012	7:43:23 PM	Bypass valve closed
8/18/2012	7:43:23 PM	Bubbler valve closed
8/18/2012	7:43:23 PM	H2 valve opened
8/18/2012	7:43:23 PM	Helium MFC set to  0.000000
8/18/2012	7:43:23 PM	H2 MFC set to  500.000000
8/18/2012	7:43:23 PM	BCl3 MFC set to  0.000000
8/18/2012	7:43:23 PM	PH3 MFC set to  0.000000
8/18/2012	7:43:23 PM	SiCl4 MFC set to  0.000000
8/18/2012	7:43:23 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	7:43:23 PM	Tube furnace set to 50
8/18/2012	7:44:34 PM	Helium valve closed
8/18/2012	7:44:34 PM	BCl3 valve closed
8/18/2012	7:44:34 PM	PH3 valve closed
8/18/2012	7:44:34 PM	SiCl4 pre valve closed
8/18/2012	7:44:34 PM	SiCl4 post valve closed
8/18/2012	7:44:34 PM	Main Vac valve closed
8/18/2012	7:44:34 PM	Bypass valve closed
8/18/2012	7:44:34 PM	H2 valve opened
8/18/2012	7:44:34 PM	Bubbler valve opened
8/18/2012	7:44:34 PM	Helium MFC set to  0.000000
8/18/2012	7:44:34 PM	H2 MFC set to  500.000000
8/18/2012	7:44:34 PM	BCl3 MFC set to  0.000000
8/18/2012	7:44:34 PM	PH3 MFC set to  0.000000
8/18/2012	7:44:34 PM	SiCl4 MFC set to  0.000000
8/18/2012	7:44:34 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	7:44:34 PM	Tube furnace set to 50
8/18/2012	7:44:35 PM	Helium valve closed
8/18/2012	7:44:35 PM	BCl3 valve closed
8/18/2012	7:44:35 PM	PH3 valve closed
8/18/2012	7:44:35 PM	SiCl4 pre valve closed
8/18/2012	7:44:35 PM	SiCl4 post valve closed
8/18/2012	7:44:35 PM	Main Vac valve closed
8/18/2012	7:44:35 PM	Bypass valve closed
8/18/2012	7:44:35 PM	H2 valve opened
8/18/2012	7:44:35 PM	Bubbler valve opened
8/18/2012	7:44:35 PM	Helium MFC set to  0.000000
8/18/2012	7:44:35 PM	H2 MFC set to  500.000000
8/18/2012	7:44:35 PM	BCl3 MFC set to  0.000000
8/18/2012	7:44:35 PM	PH3 MFC set to  0.000000
8/18/2012	7:44:35 PM	SiCl4 MFC set to  0.000000
8/18/2012	7:44:35 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	7:44:35 PM	Tube furnace set to 1000
8/18/2012	8:04:35 PM	Helium valve closed
8/18/2012	8:04:35 PM	PH3 valve closed
8/18/2012	8:04:35 PM	Main Vac valve closed
8/18/2012	8:04:35 PM	Bypass valve closed
8/18/2012	8:04:35 PM	H2 valve opened
8/18/2012	8:04:35 PM	BCl3 valve opened
8/18/2012	8:04:35 PM	SiCl4 pre valve opened
8/18/2012	8:04:35 PM	SiCl4 post valve opened
8/18/2012	8:04:35 PM	Bubbler valve opened
8/18/2012	8:04:35 PM	Helium MFC set to  0.000000
8/18/2012	8:04:35 PM	H2 MFC set to  500.000000
8/18/2012	8:04:35 PM	BCl3 MFC set to  1.000000
8/18/2012	8:04:35 PM	PH3 MFC set to  0.000000
8/18/2012	8:04:35 PM	SiCl4 MFC set to  50.000000
8/18/2012	8:04:35 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	8:04:35 PM	Tube furnace set to 1000
8/18/2012	8:24:35 PM	Helium valve closed
8/18/2012	8:24:35 PM	BCl3 valve closed
8/18/2012	8:24:35 PM	PH3 valve closed
8/18/2012	8:24:35 PM	SiCl4 pre valve closed
8/18/2012	8:24:35 PM	SiCl4 post valve closed
8/18/2012	8:24:35 PM	Main Vac valve closed
8/18/2012	8:24:35 PM	Bypass valve closed
8/18/2012	8:24:35 PM	H2 valve opened
8/18/2012	8:24:35 PM	Bubbler valve opened
8/18/2012	8:24:35 PM	Helium MFC set to  0.000000
8/18/2012	8:24:35 PM	H2 MFC set to  500.000000
8/18/2012	8:24:35 PM	BCl3 MFC set to  0.000000
8/18/2012	8:24:35 PM	PH3 MFC set to  0.000000
8/18/2012	8:24:35 PM	SiCl4 MFC set to  0.000000
8/18/2012	8:24:35 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	8:24:35 PM	Tube furnace set to 950
8/18/2012	8:27:35 PM	Helium valve closed
8/18/2012	8:27:35 PM	BCl3 valve closed
8/18/2012	8:27:35 PM	PH3 valve closed
8/18/2012	8:27:35 PM	SiCl4 pre valve closed
8/18/2012	8:27:35 PM	SiCl4 post valve closed
8/18/2012	8:27:35 PM	Main Vac valve closed
8/18/2012	8:27:35 PM	Bypass valve closed
8/18/2012	8:27:35 PM	H2 valve opened
8/18/2012	8:27:35 PM	Bubbler valve opened
8/18/2012	8:27:35 PM	Helium MFC set to  0.000000
8/18/2012	8:27:35 PM	H2 MFC set to  500.000000
8/18/2012	8:27:35 PM	BCl3 MFC set to  0.000000
8/18/2012	8:27:35 PM	PH3 MFC set to  0.000000
8/18/2012	8:27:35 PM	SiCl4 MFC set to  0.000000
8/18/2012	8:27:35 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	8:27:36 PM	Tube furnace set to 900
8/18/2012	8:30:35 PM	Helium valve closed
8/18/2012	8:30:35 PM	BCl3 valve closed
8/18/2012	8:30:35 PM	PH3 valve closed
8/18/2012	8:30:35 PM	SiCl4 pre valve closed
8/18/2012	8:30:35 PM	SiCl4 post valve closed
8/18/2012	8:30:35 PM	Main Vac valve closed
8/18/2012	8:30:35 PM	Bypass valve closed
8/18/2012	8:30:35 PM	H2 valve opened
8/18/2012	8:30:35 PM	Bubbler valve opened
8/18/2012	8:30:35 PM	Helium MFC set to  0.000000
8/18/2012	8:30:35 PM	H2 MFC set to  500.000000
8/18/2012	8:30:35 PM	BCl3 MFC set to  0.000000
8/18/2012	8:30:35 PM	PH3 MFC set to  0.000000
8/18/2012	8:30:35 PM	SiCl4 MFC set to  0.000000
8/18/2012	8:30:36 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	8:30:36 PM	Tube furnace set to 850
8/18/2012	8:33:36 PM	Helium valve closed
8/18/2012	8:33:36 PM	BCl3 valve closed
8/18/2012	8:33:36 PM	PH3 valve closed
8/18/2012	8:33:36 PM	SiCl4 pre valve closed
8/18/2012	8:33:36 PM	SiCl4 post valve closed
8/18/2012	8:33:36 PM	Main Vac valve closed
8/18/2012	8:33:36 PM	Bypass valve closed
8/18/2012	8:33:36 PM	H2 valve opened
8/18/2012	8:33:36 PM	Bubbler valve opened
8/18/2012	8:33:36 PM	Helium MFC set to  0.000000
8/18/2012	8:33:36 PM	H2 MFC set to  500.000000
8/18/2012	8:33:36 PM	BCl3 MFC set to  0.000000
8/18/2012	8:33:36 PM	PH3 MFC set to  0.000000
8/18/2012	8:33:36 PM	SiCl4 MFC set to  0.000000
8/18/2012	8:33:36 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	8:33:36 PM	Tube furnace set to 800
8/18/2012	8:36:36 PM	Helium valve closed
8/18/2012	8:36:36 PM	BCl3 valve closed
8/18/2012	8:36:36 PM	PH3 valve closed
8/18/2012	8:36:36 PM	SiCl4 pre valve closed
8/18/2012	8:36:36 PM	SiCl4 post valve closed
8/18/2012	8:36:36 PM	Main Vac valve closed
8/18/2012	8:36:36 PM	Bypass valve closed
8/18/2012	8:36:36 PM	H2 valve opened
8/18/2012	8:36:36 PM	Bubbler valve opened
8/18/2012	8:36:36 PM	Helium MFC set to  0.000000
8/18/2012	8:36:36 PM	H2 MFC set to  500.000000
8/18/2012	8:36:36 PM	BCl3 MFC set to  0.000000
8/18/2012	8:36:36 PM	PH3 MFC set to  0.000000
8/18/2012	8:36:36 PM	SiCl4 MFC set to  0.000000
8/18/2012	8:36:36 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	8:36:36 PM	Tube furnace set to 750
8/18/2012	8:39:36 PM	H2 valve closed
8/18/2012	8:39:36 PM	BCl3 valve closed
8/18/2012	8:39:36 PM	PH3 valve closed
8/18/2012	8:39:36 PM	SiCl4 pre valve closed
8/18/2012	8:39:36 PM	SiCl4 post valve closed
8/18/2012	8:39:36 PM	Main Vac valve closed
8/18/2012	8:39:36 PM	Bypass valve closed
8/18/2012	8:39:36 PM	Helium valve opened
8/18/2012	8:39:36 PM	Bubbler valve opened
8/18/2012	8:39:36 PM	Helium MFC set to  400.000000
8/18/2012	8:39:36 PM	H2 MFC set to  0.000000
8/18/2012	8:39:36 PM	BCl3 MFC set to  0.000000
8/18/2012	8:39:36 PM	PH3 MFC set to  0.000000
8/18/2012	8:39:36 PM	SiCl4 MFC set to  0.000000
8/18/2012	8:39:36 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	8:39:36 PM	Tube furnace set to 0
8/18/2012	8:50:08 PM	Helium valve closed
8/18/2012	8:50:08 PM	H2 valve closed
8/18/2012	8:50:08 PM	BCl3 valve closed
8/18/2012	8:50:08 PM	PH3 valve closed
8/18/2012	8:50:08 PM	SiCl4 pre valve closed
8/18/2012	8:50:08 PM	SiCl4 post valve closed
8/18/2012	8:50:08 PM	Main Vac valve closed
8/18/2012	8:50:08 PM	Bypass valve closed
8/18/2012	8:50:08 PM	Bubbler valve closed
8/18/2012	8:50:08 PM	Helium MFC set to  0.000000
8/18/2012	8:50:08 PM	H2 MFC set to  0.000000
8/18/2012	8:50:08 PM	BCl3 MFC set to  0.000000
8/18/2012	8:50:08 PM	PH3 MFC set to  0.000000
8/18/2012	8:50:08 PM	SiCl4 MFC set to  0.000000
8/18/2012	8:50:08 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	8:50:08 PM	Tube furnace set to 50
8/18/2012	8:50:09 PM	Helium valve closed
8/18/2012	8:50:09 PM	H2 valve closed
8/18/2012	8:50:09 PM	BCl3 valve closed
8/18/2012	8:50:09 PM	PH3 valve closed
8/18/2012	8:50:09 PM	SiCl4 pre valve closed
8/18/2012	8:50:09 PM	SiCl4 post valve closed
8/18/2012	8:50:09 PM	Main Vac valve closed
8/18/2012	8:50:09 PM	Bubbler valve closed
8/18/2012	8:50:09 PM	Bypass valve opened
8/18/2012	8:50:09 PM	Helium MFC set to  0.000000
8/18/2012	8:50:09 PM	H2 MFC set to  0.000000
8/18/2012	8:50:09 PM	BCl3 MFC set to  0.000000
8/18/2012	8:50:09 PM	PH3 MFC set to  0.000000
8/18/2012	8:50:09 PM	SiCl4 MFC set to  0.000000
8/18/2012	8:50:09 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	8:50:09 PM	Tube furnace set to 0
8/18/2012	8:51:12 PM	Helium valve closed
8/18/2012	8:51:12 PM	H2 valve closed
8/18/2012	8:51:12 PM	BCl3 valve closed
8/18/2012	8:51:12 PM	PH3 valve closed
8/18/2012	8:51:12 PM	SiCl4 pre valve closed
8/18/2012	8:51:12 PM	SiCl4 post valve closed
8/18/2012	8:51:12 PM	Bypass valve closed
8/18/2012	8:51:12 PM	Bubbler valve closed
8/18/2012	8:51:12 PM	Main Vac valve opened
8/18/2012	8:51:12 PM	Helium MFC set to  0.000000
8/18/2012	8:51:12 PM	H2 MFC set to  0.000000
8/18/2012	8:51:12 PM	BCl3 MFC set to  0.000000
8/18/2012	8:51:12 PM	PH3 MFC set to  0.000000
8/18/2012	8:51:12 PM	SiCl4 MFC set to  0.000000
8/18/2012	8:51:12 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	8:51:12 PM	Tube furnace set to 0
8/18/2012	8:51:13 PM	Run finished at 8:51 PM
8/18/2012	8:51:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/18/2012	8:51:31 PM	Recipe started at 8:51 PM
8/18/2012	8:51:31 PM	Helium valve closed
8/18/2012	8:51:31 PM	H2 valve closed
8/18/2012	8:51:31 PM	BCl3 valve closed
8/18/2012	8:51:31 PM	PH3 valve closed
8/18/2012	8:51:31 PM	SiCl4 pre valve closed
8/18/2012	8:51:31 PM	SiCl4 post valve closed
8/18/2012	8:51:31 PM	Main Vac valve closed
8/18/2012	8:51:31 PM	Bypass valve closed
8/18/2012	8:51:31 PM	Bubbler valve closed
8/18/2012	8:51:31 PM	Helium MFC set to  0.000000
8/18/2012	8:51:31 PM	H2 MFC set to  0.000000
8/18/2012	8:51:31 PM	BCl3 MFC set to  0.000000
8/18/2012	8:51:31 PM	PH3 MFC set to  0.000000
8/18/2012	8:51:31 PM	SiCl4 MFC set to  0.000000
8/18/2012	8:51:31 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	8:51:31 PM	Tube furnace set to 0
8/18/2012	8:51:34 PM	H2 valve closed
8/18/2012	8:51:34 PM	BCl3 valve closed
8/18/2012	8:51:34 PM	PH3 valve closed
8/18/2012	8:51:34 PM	SiCl4 pre valve closed
8/18/2012	8:51:34 PM	SiCl4 post valve closed
8/18/2012	8:51:34 PM	Main Vac valve closed
8/18/2012	8:51:34 PM	Bypass valve closed
8/18/2012	8:51:34 PM	Bubbler valve closed
8/18/2012	8:51:34 PM	Helium valve opened
8/18/2012	8:51:34 PM	Helium MFC set to  500.000000
8/18/2012	8:51:34 PM	H2 MFC set to  0.000000
8/18/2012	8:51:34 PM	BCl3 MFC set to  0.000000
8/18/2012	8:51:34 PM	PH3 MFC set to  0.000000
8/18/2012	8:51:34 PM	SiCl4 MFC set to  0.000000
8/18/2012	8:51:34 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	8:51:34 PM	Tube furnace set to 0
8/18/2012	8:52:42 PM	Helium valve closed
8/18/2012	8:52:42 PM	H2 valve closed
8/18/2012	8:52:42 PM	BCl3 valve closed
8/18/2012	8:52:42 PM	PH3 valve closed
8/18/2012	8:52:42 PM	SiCl4 pre valve closed
8/18/2012	8:52:42 PM	SiCl4 post valve closed
8/18/2012	8:52:42 PM	Main Vac valve closed
8/18/2012	8:52:42 PM	Bypass valve closed
8/18/2012	8:52:42 PM	Bubbler valve closed
8/18/2012	8:52:42 PM	Helium MFC set to  0.000000
8/18/2012	8:52:42 PM	H2 MFC set to  0.000000
8/18/2012	8:52:42 PM	BCl3 MFC set to  0.000000
8/18/2012	8:52:42 PM	PH3 MFC set to  0.000000
8/18/2012	8:52:42 PM	SiCl4 MFC set to  0.000000
8/18/2012	8:52:42 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	8:52:42 PM	Tube furnace set to 0
8/18/2012	8:52:43 PM	Run finished at 8:52 PM
8/18/2012	8:52:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/18/2012	8:56:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2012	8:56:29 PM	Recipe started at 8:56 PM
8/18/2012	8:56:29 PM	Helium valve closed
8/18/2012	8:56:29 PM	H2 valve closed
8/18/2012	8:56:29 PM	BCl3 valve closed
8/18/2012	8:56:29 PM	PH3 valve closed
8/18/2012	8:56:29 PM	SiCl4 pre valve closed
8/18/2012	8:56:29 PM	SiCl4 post valve closed
8/18/2012	8:56:29 PM	Main Vac valve closed
8/18/2012	8:56:30 PM	Bubbler valve closed
8/18/2012	8:56:30 PM	Bypass valve opened
8/18/2012	8:56:30 PM	Helium MFC set to  0.000000
8/18/2012	8:56:30 PM	H2 MFC set to  0.000000
8/18/2012	8:56:30 PM	BCl3 MFC set to  0.000000
8/18/2012	8:56:30 PM	PH3 MFC set to  0.000000
8/18/2012	8:56:30 PM	SiCl4 MFC set to  0.000000
8/18/2012	8:56:30 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	8:56:30 PM	Tube furnace set to 0
8/18/2012	8:57:43 PM	Helium valve closed
8/18/2012	8:57:43 PM	H2 valve closed
8/18/2012	8:57:43 PM	BCl3 valve closed
8/18/2012	8:57:43 PM	PH3 valve closed
8/18/2012	8:57:43 PM	SiCl4 pre valve closed
8/18/2012	8:57:43 PM	SiCl4 post valve closed
8/18/2012	8:57:43 PM	Main Vac valve closed
8/18/2012	8:57:43 PM	Bubbler valve closed
8/18/2012	8:57:43 PM	Bypass valve opened
8/18/2012	8:57:43 PM	Helium MFC set to  0.000000
8/18/2012	8:57:43 PM	H2 MFC set to  0.000000
8/18/2012	8:57:43 PM	BCl3 MFC set to  0.000000
8/18/2012	8:57:43 PM	PH3 MFC set to  0.000000
8/18/2012	8:57:43 PM	SiCl4 MFC set to  0.000000
8/18/2012	8:57:43 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	8:57:43 PM	Tube furnace set to 0
8/18/2012	8:58:43 PM	Helium valve closed
8/18/2012	8:58:43 PM	H2 valve closed
8/18/2012	8:58:43 PM	BCl3 valve closed
8/18/2012	8:58:43 PM	PH3 valve closed
8/18/2012	8:58:43 PM	SiCl4 pre valve closed
8/18/2012	8:58:43 PM	SiCl4 post valve closed
8/18/2012	8:58:43 PM	Bypass valve closed
8/18/2012	8:58:43 PM	Bubbler valve closed
8/18/2012	8:58:43 PM	Main Vac valve opened
8/18/2012	8:58:43 PM	Helium MFC set to  0.000000
8/18/2012	8:58:43 PM	H2 MFC set to  0.000000
8/18/2012	8:58:43 PM	BCl3 MFC set to  0.000000
8/18/2012	8:58:43 PM	PH3 MFC set to  0.000000
8/18/2012	8:58:43 PM	SiCl4 MFC set to  0.000000
8/18/2012	8:58:43 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	8:58:43 PM	Tube furnace set to 0
8/18/2012	8:58:44 PM	Run finished at 8:58 PM
8/18/2012	8:58:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2012	10:12:29 PM	Recipe started at 10:12 PM
8/18/2012	10:12:29 PM	Helium valve closed
8/18/2012	10:12:29 PM	H2 valve closed
8/18/2012	10:12:29 PM	BCl3 valve closed
8/18/2012	10:12:29 PM	PH3 valve closed
8/18/2012	10:12:29 PM	SiCl4 pre valve closed
8/18/2012	10:12:29 PM	SiCl4 post valve closed
8/18/2012	10:12:29 PM	Main Vac valve closed
8/18/2012	10:12:29 PM	Bypass valve closed
8/18/2012	10:12:29 PM	Bubbler valve closed
8/18/2012	10:12:29 PM	Helium MFC set to  0.000000
8/18/2012	10:12:29 PM	H2 MFC set to  0.000000
8/18/2012	10:12:29 PM	BCl3 MFC set to  0.000000
8/18/2012	10:12:29 PM	PH3 MFC set to  0.000000
8/18/2012	10:12:29 PM	SiCl4 MFC set to  0.000000
8/18/2012	10:12:29 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	10:12:29 PM	Tube furnace set to 0
8/18/2012	10:12:32 PM	Helium valve closed
8/18/2012	10:12:32 PM	BCl3 valve closed
8/18/2012	10:12:32 PM	PH3 valve closed
8/18/2012	10:12:32 PM	SiCl4 pre valve closed
8/18/2012	10:12:32 PM	SiCl4 post valve closed
8/18/2012	10:12:32 PM	Main Vac valve closed
8/18/2012	10:12:32 PM	Bypass valve closed
8/18/2012	10:12:32 PM	Bubbler valve closed
8/18/2012	10:12:32 PM	H2 valve opened
8/18/2012	10:12:32 PM	Helium MFC set to  0.000000
8/18/2012	10:12:32 PM	H2 MFC set to  500.000000
8/18/2012	10:12:32 PM	BCl3 MFC set to  0.000000
8/18/2012	10:12:32 PM	PH3 MFC set to  0.000000
8/18/2012	10:12:32 PM	SiCl4 MFC set to  0.000000
8/18/2012	10:12:32 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	10:12:32 PM	Tube furnace set to 50
8/18/2012	10:13:44 PM	Helium valve closed
8/18/2012	10:13:44 PM	BCl3 valve closed
8/18/2012	10:13:44 PM	PH3 valve closed
8/18/2012	10:13:44 PM	SiCl4 pre valve closed
8/18/2012	10:13:44 PM	SiCl4 post valve closed
8/18/2012	10:13:44 PM	Main Vac valve closed
8/18/2012	10:13:44 PM	Bypass valve closed
8/18/2012	10:13:44 PM	H2 valve opened
8/18/2012	10:13:44 PM	Bubbler valve opened
8/18/2012	10:13:44 PM	Helium MFC set to  0.000000
8/18/2012	10:13:44 PM	H2 MFC set to  500.000000
8/18/2012	10:13:44 PM	BCl3 MFC set to  0.000000
8/18/2012	10:13:44 PM	PH3 MFC set to  0.000000
8/18/2012	10:13:44 PM	SiCl4 MFC set to  0.000000
8/18/2012	10:13:44 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	10:13:44 PM	Tube furnace set to 50
8/18/2012	10:13:45 PM	Helium valve closed
8/18/2012	10:13:45 PM	BCl3 valve closed
8/18/2012	10:13:45 PM	PH3 valve closed
8/18/2012	10:13:45 PM	SiCl4 pre valve closed
8/18/2012	10:13:45 PM	SiCl4 post valve closed
8/18/2012	10:13:45 PM	Main Vac valve closed
8/18/2012	10:13:45 PM	Bypass valve closed
8/18/2012	10:13:45 PM	H2 valve opened
8/18/2012	10:13:45 PM	Bubbler valve opened
8/18/2012	10:13:45 PM	Helium MFC set to  0.000000
8/18/2012	10:13:45 PM	H2 MFC set to  500.000000
8/18/2012	10:13:45 PM	BCl3 MFC set to  0.000000
8/18/2012	10:13:45 PM	PH3 MFC set to  0.000000
8/18/2012	10:13:45 PM	SiCl4 MFC set to  0.000000
8/18/2012	10:13:45 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	10:13:45 PM	Tube furnace set to 1000
8/18/2012	10:33:45 PM	Helium valve closed
8/18/2012	10:33:45 PM	PH3 valve closed
8/18/2012	10:33:45 PM	Main Vac valve closed
8/18/2012	10:33:45 PM	Bypass valve closed
8/18/2012	10:33:45 PM	H2 valve opened
8/18/2012	10:33:45 PM	BCl3 valve opened
8/18/2012	10:33:45 PM	SiCl4 pre valve opened
8/18/2012	10:33:45 PM	SiCl4 post valve opened
8/18/2012	10:33:45 PM	Bubbler valve opened
8/18/2012	10:33:45 PM	Helium MFC set to  0.000000
8/18/2012	10:33:45 PM	H2 MFC set to  500.000000
8/18/2012	10:33:45 PM	BCl3 MFC set to  1.000000
8/18/2012	10:33:45 PM	PH3 MFC set to  0.000000
8/18/2012	10:33:45 PM	SiCl4 MFC set to  50.000000
8/18/2012	10:33:45 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	10:33:45 PM	Tube furnace set to 1000
8/18/2012	10:53:45 PM	Helium valve closed
8/18/2012	10:53:45 PM	BCl3 valve closed
8/18/2012	10:53:45 PM	PH3 valve closed
8/18/2012	10:53:45 PM	SiCl4 pre valve closed
8/18/2012	10:53:45 PM	SiCl4 post valve closed
8/18/2012	10:53:45 PM	Main Vac valve closed
8/18/2012	10:53:45 PM	Bypass valve closed
8/18/2012	10:53:45 PM	H2 valve opened
8/18/2012	10:53:45 PM	Bubbler valve opened
8/18/2012	10:53:45 PM	Helium MFC set to  0.000000
8/18/2012	10:53:45 PM	H2 MFC set to  500.000000
8/18/2012	10:53:45 PM	BCl3 MFC set to  0.000000
8/18/2012	10:53:45 PM	PH3 MFC set to  0.000000
8/18/2012	10:53:45 PM	SiCl4 MFC set to  0.000000
8/18/2012	10:53:45 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	10:53:45 PM	Tube furnace set to 950
8/18/2012	10:56:45 PM	Helium valve closed
8/18/2012	10:56:45 PM	BCl3 valve closed
8/18/2012	10:56:45 PM	PH3 valve closed
8/18/2012	10:56:45 PM	SiCl4 pre valve closed
8/18/2012	10:56:45 PM	SiCl4 post valve closed
8/18/2012	10:56:45 PM	Main Vac valve closed
8/18/2012	10:56:45 PM	Bypass valve closed
8/18/2012	10:56:45 PM	H2 valve opened
8/18/2012	10:56:45 PM	Bubbler valve opened
8/18/2012	10:56:45 PM	Helium MFC set to  0.000000
8/18/2012	10:56:45 PM	H2 MFC set to  500.000000
8/18/2012	10:56:45 PM	BCl3 MFC set to  0.000000
8/18/2012	10:56:45 PM	PH3 MFC set to  0.000000
8/18/2012	10:56:45 PM	SiCl4 MFC set to  0.000000
8/18/2012	10:56:45 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	10:56:46 PM	Tube furnace set to 900
8/18/2012	10:59:46 PM	Helium valve closed
8/18/2012	10:59:46 PM	BCl3 valve closed
8/18/2012	10:59:46 PM	PH3 valve closed
8/18/2012	10:59:46 PM	SiCl4 pre valve closed
8/18/2012	10:59:46 PM	SiCl4 post valve closed
8/18/2012	10:59:46 PM	Main Vac valve closed
8/18/2012	10:59:46 PM	Bypass valve closed
8/18/2012	10:59:46 PM	H2 valve opened
8/18/2012	10:59:46 PM	Bubbler valve opened
8/18/2012	10:59:46 PM	Helium MFC set to  0.000000
8/18/2012	10:59:46 PM	H2 MFC set to  500.000000
8/18/2012	10:59:46 PM	BCl3 MFC set to  0.000000
8/18/2012	10:59:46 PM	PH3 MFC set to  0.000000
8/18/2012	10:59:46 PM	SiCl4 MFC set to  0.000000
8/18/2012	10:59:46 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	10:59:46 PM	Tube furnace set to 850
8/18/2012	11:02:46 PM	Helium valve closed
8/18/2012	11:02:46 PM	BCl3 valve closed
8/18/2012	11:02:46 PM	PH3 valve closed
8/18/2012	11:02:46 PM	SiCl4 pre valve closed
8/18/2012	11:02:46 PM	SiCl4 post valve closed
8/18/2012	11:02:46 PM	Main Vac valve closed
8/18/2012	11:02:46 PM	Bypass valve closed
8/18/2012	11:02:46 PM	H2 valve opened
8/18/2012	11:02:46 PM	Bubbler valve opened
8/18/2012	11:02:46 PM	Helium MFC set to  0.000000
8/18/2012	11:02:46 PM	H2 MFC set to  500.000000
8/18/2012	11:02:46 PM	BCl3 MFC set to  0.000000
8/18/2012	11:02:46 PM	PH3 MFC set to  0.000000
8/18/2012	11:02:46 PM	SiCl4 MFC set to  0.000000
8/18/2012	11:02:46 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	11:02:46 PM	Tube furnace set to 800
8/18/2012	11:05:46 PM	Helium valve closed
8/18/2012	11:05:46 PM	BCl3 valve closed
8/18/2012	11:05:46 PM	PH3 valve closed
8/18/2012	11:05:46 PM	SiCl4 pre valve closed
8/18/2012	11:05:46 PM	SiCl4 post valve closed
8/18/2012	11:05:46 PM	Main Vac valve closed
8/18/2012	11:05:46 PM	Bypass valve closed
8/18/2012	11:05:46 PM	H2 valve opened
8/18/2012	11:05:46 PM	Bubbler valve opened
8/18/2012	11:05:46 PM	Helium MFC set to  0.000000
8/18/2012	11:05:46 PM	H2 MFC set to  500.000000
8/18/2012	11:05:46 PM	BCl3 MFC set to  0.000000
8/18/2012	11:05:46 PM	PH3 MFC set to  0.000000
8/18/2012	11:05:46 PM	SiCl4 MFC set to  0.000000
8/18/2012	11:05:46 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	11:05:46 PM	Tube furnace set to 750
8/18/2012	11:08:46 PM	H2 valve closed
8/18/2012	11:08:46 PM	BCl3 valve closed
8/18/2012	11:08:46 PM	PH3 valve closed
8/18/2012	11:08:46 PM	SiCl4 pre valve closed
8/18/2012	11:08:46 PM	SiCl4 post valve closed
8/18/2012	11:08:46 PM	Main Vac valve closed
8/18/2012	11:08:46 PM	Bypass valve closed
8/18/2012	11:08:46 PM	Helium valve opened
8/18/2012	11:08:46 PM	Bubbler valve opened
8/18/2012	11:08:46 PM	Helium MFC set to  400.000000
8/18/2012	11:08:46 PM	H2 MFC set to  0.000000
8/18/2012	11:08:46 PM	BCl3 MFC set to  0.000000
8/18/2012	11:08:46 PM	PH3 MFC set to  0.000000
8/18/2012	11:08:46 PM	SiCl4 MFC set to  0.000000
8/18/2012	11:08:46 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	11:08:47 PM	Tube furnace set to 0
8/18/2012	11:20:55 PM	Helium valve closed
8/18/2012	11:20:55 PM	H2 valve closed
8/18/2012	11:20:55 PM	BCl3 valve closed
8/18/2012	11:20:55 PM	PH3 valve closed
8/18/2012	11:20:55 PM	SiCl4 pre valve closed
8/18/2012	11:20:55 PM	SiCl4 post valve closed
8/18/2012	11:20:55 PM	Main Vac valve closed
8/18/2012	11:20:55 PM	Bypass valve closed
8/18/2012	11:20:55 PM	Bubbler valve closed
8/18/2012	11:20:55 PM	Helium MFC set to  0.000000
8/18/2012	11:20:55 PM	H2 MFC set to  0.000000
8/18/2012	11:20:55 PM	BCl3 MFC set to  0.000000
8/18/2012	11:20:55 PM	PH3 MFC set to  0.000000
8/18/2012	11:20:55 PM	SiCl4 MFC set to  0.000000
8/18/2012	11:20:55 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	11:20:56 PM	Tube furnace set to 50
8/18/2012	11:21:10 PM	Helium valve closed
8/18/2012	11:21:10 PM	H2 valve closed
8/18/2012	11:21:10 PM	BCl3 valve closed
8/18/2012	11:21:10 PM	PH3 valve closed
8/18/2012	11:21:10 PM	SiCl4 pre valve closed
8/18/2012	11:21:10 PM	SiCl4 post valve closed
8/18/2012	11:21:10 PM	Main Vac valve closed
8/18/2012	11:21:10 PM	Bubbler valve closed
8/18/2012	11:21:10 PM	Bypass valve opened
8/18/2012	11:21:10 PM	Helium MFC set to  0.000000
8/18/2012	11:21:10 PM	H2 MFC set to  0.000000
8/18/2012	11:21:10 PM	BCl3 MFC set to  0.000000
8/18/2012	11:21:10 PM	PH3 MFC set to  0.000000
8/18/2012	11:21:10 PM	SiCl4 MFC set to  0.000000
8/18/2012	11:21:10 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	11:21:10 PM	Tube furnace set to 0
8/18/2012	11:22:11 PM	Helium valve closed
8/18/2012	11:22:11 PM	H2 valve closed
8/18/2012	11:22:11 PM	BCl3 valve closed
8/18/2012	11:22:11 PM	PH3 valve closed
8/18/2012	11:22:11 PM	SiCl4 pre valve closed
8/18/2012	11:22:11 PM	SiCl4 post valve closed
8/18/2012	11:22:11 PM	Bypass valve closed
8/18/2012	11:22:11 PM	Bubbler valve closed
8/18/2012	11:22:11 PM	Main Vac valve opened
8/18/2012	11:22:11 PM	Helium MFC set to  0.000000
8/18/2012	11:22:11 PM	H2 MFC set to  0.000000
8/18/2012	11:22:11 PM	BCl3 MFC set to  0.000000
8/18/2012	11:22:11 PM	PH3 MFC set to  0.000000
8/18/2012	11:22:11 PM	SiCl4 MFC set to  0.000000
8/18/2012	11:22:11 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	11:22:12 PM	Tube furnace set to 0
8/18/2012	11:22:13 PM	Run finished at 11:22 PM
8/18/2012	11:22:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/18/2012	11:22:18 PM	Recipe started at 11:22 PM
8/18/2012	11:22:18 PM	Helium valve closed
8/18/2012	11:22:18 PM	H2 valve closed
8/18/2012	11:22:18 PM	BCl3 valve closed
8/18/2012	11:22:18 PM	PH3 valve closed
8/18/2012	11:22:18 PM	SiCl4 pre valve closed
8/18/2012	11:22:18 PM	SiCl4 post valve closed
8/18/2012	11:22:18 PM	Main Vac valve closed
8/18/2012	11:22:18 PM	Bypass valve closed
8/18/2012	11:22:18 PM	Bubbler valve closed
8/18/2012	11:22:18 PM	Helium MFC set to  0.000000
8/18/2012	11:22:18 PM	H2 MFC set to  0.000000
8/18/2012	11:22:18 PM	BCl3 MFC set to  0.000000
8/18/2012	11:22:18 PM	PH3 MFC set to  0.000000
8/18/2012	11:22:18 PM	SiCl4 MFC set to  0.000000
8/18/2012	11:22:18 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	11:22:18 PM	Tube furnace set to 0
8/18/2012	11:22:21 PM	H2 valve closed
8/18/2012	11:22:21 PM	BCl3 valve closed
8/18/2012	11:22:21 PM	PH3 valve closed
8/18/2012	11:22:21 PM	SiCl4 pre valve closed
8/18/2012	11:22:21 PM	SiCl4 post valve closed
8/18/2012	11:22:21 PM	Main Vac valve closed
8/18/2012	11:22:21 PM	Bypass valve closed
8/18/2012	11:22:21 PM	Bubbler valve closed
8/18/2012	11:22:21 PM	Helium valve opened
8/18/2012	11:22:21 PM	Helium MFC set to  500.000000
8/18/2012	11:22:21 PM	H2 MFC set to  0.000000
8/18/2012	11:22:21 PM	BCl3 MFC set to  0.000000
8/18/2012	11:22:21 PM	PH3 MFC set to  0.000000
8/18/2012	11:22:21 PM	SiCl4 MFC set to  0.000000
8/18/2012	11:22:21 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	11:22:21 PM	Tube furnace set to 0
8/18/2012	11:23:30 PM	Helium valve closed
8/18/2012	11:23:30 PM	H2 valve closed
8/18/2012	11:23:30 PM	BCl3 valve closed
8/18/2012	11:23:30 PM	PH3 valve closed
8/18/2012	11:23:30 PM	SiCl4 pre valve closed
8/18/2012	11:23:30 PM	SiCl4 post valve closed
8/18/2012	11:23:30 PM	Main Vac valve closed
8/18/2012	11:23:30 PM	Bypass valve closed
8/18/2012	11:23:30 PM	Bubbler valve closed
8/18/2012	11:23:30 PM	Helium MFC set to  0.000000
8/18/2012	11:23:30 PM	H2 MFC set to  0.000000
8/18/2012	11:23:30 PM	BCl3 MFC set to  0.000000
8/18/2012	11:23:30 PM	PH3 MFC set to  0.000000
8/18/2012	11:23:30 PM	SiCl4 MFC set to  0.000000
8/18/2012	11:23:30 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	11:23:30 PM	Tube furnace set to 0
8/18/2012	11:23:31 PM	Run finished at 11:23 PM
8/18/2012	11:23:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/18/2012	11:26:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2012	11:26:14 PM	Recipe started at 11:26 PM
8/18/2012	11:26:14 PM	Helium valve closed
8/18/2012	11:26:14 PM	H2 valve closed
8/18/2012	11:26:14 PM	BCl3 valve closed
8/18/2012	11:26:14 PM	PH3 valve closed
8/18/2012	11:26:14 PM	SiCl4 pre valve closed
8/18/2012	11:26:14 PM	SiCl4 post valve closed
8/18/2012	11:26:14 PM	Main Vac valve closed
8/18/2012	11:26:14 PM	Bubbler valve closed
8/18/2012	11:26:14 PM	Bypass valve opened
8/18/2012	11:26:14 PM	Helium MFC set to  0.000000
8/18/2012	11:26:14 PM	H2 MFC set to  0.000000
8/18/2012	11:26:14 PM	BCl3 MFC set to  0.000000
8/18/2012	11:26:14 PM	PH3 MFC set to  0.000000
8/18/2012	11:26:14 PM	SiCl4 MFC set to  0.000000
8/18/2012	11:26:14 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	11:26:15 PM	Tube furnace set to 0
8/18/2012	11:27:28 PM	Helium valve closed
8/18/2012	11:27:28 PM	H2 valve closed
8/18/2012	11:27:28 PM	BCl3 valve closed
8/18/2012	11:27:28 PM	PH3 valve closed
8/18/2012	11:27:28 PM	SiCl4 pre valve closed
8/18/2012	11:27:28 PM	SiCl4 post valve closed
8/18/2012	11:27:28 PM	Main Vac valve closed
8/18/2012	11:27:28 PM	Bubbler valve closed
8/18/2012	11:27:28 PM	Bypass valve opened
8/18/2012	11:27:28 PM	Helium MFC set to  0.000000
8/18/2012	11:27:28 PM	H2 MFC set to  0.000000
8/18/2012	11:27:28 PM	BCl3 MFC set to  0.000000
8/18/2012	11:27:28 PM	PH3 MFC set to  0.000000
8/18/2012	11:27:28 PM	SiCl4 MFC set to  0.000000
8/18/2012	11:27:28 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	11:27:28 PM	Tube furnace set to 0
8/18/2012	11:28:28 PM	Helium valve closed
8/18/2012	11:28:28 PM	H2 valve closed
8/18/2012	11:28:28 PM	BCl3 valve closed
8/18/2012	11:28:28 PM	PH3 valve closed
8/18/2012	11:28:28 PM	SiCl4 pre valve closed
8/18/2012	11:28:28 PM	SiCl4 post valve closed
8/18/2012	11:28:28 PM	Bypass valve closed
8/18/2012	11:28:28 PM	Bubbler valve closed
8/18/2012	11:28:28 PM	Main Vac valve opened
8/18/2012	11:28:28 PM	Helium MFC set to  0.000000
8/18/2012	11:28:28 PM	H2 MFC set to  0.000000
8/18/2012	11:28:28 PM	BCl3 MFC set to  0.000000
8/18/2012	11:28:28 PM	PH3 MFC set to  0.000000
8/18/2012	11:28:28 PM	SiCl4 MFC set to  0.000000
8/18/2012	11:28:28 PM	Bypass solenoid MFC set to  0.000000
8/18/2012	11:28:28 PM	Tube furnace set to 0
8/18/2012	11:28:29 PM	Run finished at 11:28 PM
8/18/2012	11:28:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
